German Federal President Frank-Walter Steinmeier announced the winners of the Deutscher Zukunftspreis 2020 (German Future Prize 2020) in a ceremony in Berlin. The Federal President honored the team made up of Dr. Peter Kürz from the ZEISS Semiconductor Manufacturing Technology (SMT) segment, Dr. Michael Kösters from TRUMPF Lasersystems for Semiconductor Manufacturing, and Dr. Sergiy Yulin from the Fraunhofer Institute for Applied Optics and Precision Engineering (IOF) in Jena, bestowing on them his technology and innovation award for their project titled “EUV Lithography – New Light for the Digital Age”.
The winning team made a significant contribution to developing EUV technology and preparing it for industrial series production. The result? A future-proof technology backed by more than 2,000 patents which forms the basis for the digitalization of our daily lives and enables applications such as automated driving, 5G, Artificial Intelligence and other future innovations. Thanks to EUV, over 3,300 high-tech jobs have been created at ZEISS and TRUMPF to date and an annual turnover of more than one billion euros – with an upward trend – was generated in 2019.
Source: “ZEISS, TRUMPF and Fraunhofer research team awarded the Deutscher Zukunftspreis 2020 for the development of EUV lithography”, Fraunhofer-Gesellschaft