Category: MEMS

MicroElectroMechanical Systems (MEMS): Preface

MicroElectroMechanical Systems (MEMS): Preface

Aim of the study element

To provide basic information about micromachining and microfabrication processes, and the variety of technologies which are crucial for MEMS fabrication. This paragraph will also introduce the requirements for design and MEMS systems analysis  techniques, and fundamentals of MEMS devices like sensors and actuators.

Learning outcome

Having successfully completed this element you will be able to:

  • Understand the concept of Microelectromechanical Systems, their classification and features.
  • Be familiar with MEMS fabrication techniques.
  • Be able to analyse MEMS devices, and design MEMS-based systems.

Covered topics

  • Introduction into MEMS.
  • MEMS classification.
  • MEMS fabrication.
  • MEMS analysis.
  • MEMS applications.


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